EDA and lithography machine can be said to be the Pearl on the crown of chip R & D and production equipment. According to the latest news, ASML in the Netherlands is developing a new lithography machine, worth up to US $400 million (about 2.6 billion yuan), and the double deck bus is large and weighs more than 200 tons** The prototype is expected to be completed in the first half of 2023, put into use for the first time in 2025, and mainly shipped from 2026 to 2030.
This machine should refer to high NA exe: 5200 (0.55na). Intel is the first company in the world to place an order. The so-called high NA means high numerical aperture. Nodes after 2nm have to rely on it.
The financial report of exml: 5200 has been published in more than one quarter of this year. According to the plan, the first prototype trial machine will be opened in 2023 and is expected to be installed by IMEC (Belgium Microelectronics Research Center). It will be mass produced after 2025, and the first one is expected to be delivered to Intel.
It is understood that, in fact, the EUV lithography machine of ASML is very large. The 0.33na EUV lithography machine on sale has more than 100000 parts. It needs 40 shipping containers or 4 jet cargo planes to be transported at one time, with a unit price of about US $140 million.
